METHOD FOR MANUFACTURING OF ACOUSTO-OPTIC DEVICE Russian patent published in 2021 - IPC H01L41/22 

FIELD: acousto-optics

SUBSTANCE: invention relates to methods for the manufacture of acousto-optic (AO) devices, in particular for the manufacture of modulators based on a single crystal of paratellurite, multichannel modulators, deflectors, tunable filters and other devices. The method for manufacturing of acousto-optic device consists in using a sound conductor with a first acoustic facet and two optical faces, a piezoelectric plate with a second acoustic facet and electrical conductors, moreover the length of the first acoustic facet is chosen in at least one direction more than one of the dimensions of the second acoustic facet. Further, optically antireflection coatings are applied by vacuum deposition on the optical edges of the sound conductor, the first adhesion layer is applied by vacuum deposition on the first acoustic face of the sound conductor, then the first layer of gold is applied by vacuum deposition on the specified first adhesive layer, the second adhesive layer is applied by vacuum deposition on the specified second acoustic face of the piezoelectric plate. After that, the second layer of gold is applied by vacuum deposition on the specified second adhesion layer, then a layer of indium is applied by vacuum deposition on the specified second layer of gold, then the piezoelectric plate is applied with a layer of indium on the first layer of gold, then the piezoelectric plate is compressed with a sound conductor, then the piezoelectric plate is thinned to a thickness corresponding to the working in the frequency range, with the formation of the third acoustic facet, then the third adhesion layer is applied by vacuum deposition on the third acoustic facet of the piezoelectric plate, then the third layer of gold is applied by vacuum deposition on the specified third adhesion layer. Wherein electrical conductors are used, the surface layer of which is made of gold, and one of the said electrical conductors is connected by means of ultrasonic welding to the first layer of gold, and the other of the said electrical conductors is connected by means of ultrasonic welding to the third layer of gold.

EFFECT: improving reliability of connecting electrical conductors to an acousto-optical device, efficiency and broadbandness of AO devices by reducing electrical and acoustic losses while significantly improving manufacturability of automated assembly of devices, that is important for serial production.

13 cl, 3 dwg