METHOD OF MAKING SUPERCONDUCTING SINGLE-PHOTON DETECTORS Russian patent published in 2013 - IPC B82B3/00 C23C14/58 H01L39/24 

FIELD: physics.

SUBSTANCE: invention relates to production of superconducting compounds and making nano-conductors and devices based thereon, which can be used in electrical engineering, radio engineering, medical industry and other industries, particularly for optical testing of microchips, analysing radiation of quantum dots and in quantum cryptographic systems. The method involves formation of a conductance channel from niobium nitride on a dielectric substrate using any of the existing methods with thickness of not more than 20 nm but not less than the thickness which results in disruption of continuity and with a width of not more than 350 nm and subsequent irradiation thereof with a stream of accelerated particles in the presence of oxygen. The accelerated particles used are hydrogen atoms or protons, helium ions or atoms, oxygen ions or atoms or mixtures of said particles with energy ranging from 0.5 keV to 5.0 keV. The substrate used is leucosapphire.

EFFECT: high efficiency of detection.

5 cl, 1 dwg