FIELD: electricity.
SUBSTANCE: method of superconductive nanoelements manufacturing with tunnel or Josephson junctions includes formation of nanoelements of substances having superconductive properties and their transformation to non-conducting ones at the selected dividing area with the preset width due to selective change of atomic composition by impact of accelerated beam through protecting mask with the preset relief.
EFFECT: potential improvement of productivity.
9 cl, 2 dwg
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