METHOD OF FORMING SUPERCONDUCTING FUNCTIONAL ELEMENTS OF ELECTRONIC DEVICES HAVING REGIONS WITH DIFFERENT VALUES OF CRITICAL CURRENT DENSITY Russian patent published in 2019 - IPC H01L39/16 

Abstract RU 2694800 C1

FIELD: electrical engineering.

SUBSTANCE: invention can be used to create functional switched electronic devices. Essence of the invention is that the method of forming superconducting functional elements of electronic devices having regions with different values of critical current density involves using corpuscular radiation, wherein elements of required geometric shapes and sizes are created, only selected portions of functional elements are irradiated, and low-energy flux of ions or atoms is used as corpuscular radiation, which energy and dose are sufficient for formation of crystal structure defects and / or superconductor material stoichiometry change.

EFFECT: generation of nanosize functional elements of electronic devices with stable parameters of critical current in required areas.

3 cl, 1 dwg, 1 tbl

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RU 2 694 800 C1

Authors

Gurovich Boris Aronovich

Prikhodko Kirill Evgenevich

Domantovskij Aleksandr Grigorevich

Kuleshova Evgeniya Anatolevna

Kutuzov Leonid Vyacheslavovich

Dates

2019-07-16Published

2018-11-21Filed