SURFACE RELIEF DETERMINING METHOD Russian patent published in 2013 - IPC H01J37/28 G01B9/00 

FIELD: measurement equipment.

SUBSTANCE: surface relief determining method involves movement along the investigated surface of a set of sensitive elements and recording of their readings proportional to relief changes. Sensitive elements are elastic; they do not contact each other and tightly fill in the plane area above the investigated surface section; they are arranged in field of vision of speckle interferometer; specklogram of sensitive elements is recorded as a reference one prior to the beginning of their movement along the investigated surface and their specklogram at each time moment during movement; those specklograms are compared by means of deduction, and as per the speckle interferometer obtained as a result of comparison, in which simultaneous real-time recording of the lines of micromovement level of all sensitive elements of the set in the form of speckle interferometer bands is performed, and deflection of each sensitive element is determined as per the corresponding fragment of speckle interferogram.

EFFECT: increasing informativity on the surface profile, and information retrieval and processing speed.

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