ELECTROSTATIC ACTUATOR Russian patent published in 2013 - IPC H02N1/10 

FIELD: electrical engineering.

SUBSTANCE: invention is related to devices of electromechanical energy conversion; it is a fast-acting high power-consuming capacitance transducer manufactured by microtecnologies and it can be used in devices where it is necessary to create high mechanical forces in short period of time, for example, in fuel injectors in combustion engine cylinders, fluid jet injectors, miniature motors for micro aircraft and microrobots. The actuator contains a body with input to supply voltage pulse, a fixed plate rigidly mounted in the lower part of the body at which surface electrode and the first layer of dielectric material are deposited in sequence, a plate movable along guides. At the surface of the movable plate there is a thin metal film with one free end. At the surface of the first layer of dielectric material there is additional deposited thin layer of another dielectric material with low roughness and ratio of dielectric permeability and thickness close to the respective parameter of the first layer of dielectric material.

EFFECT: increase of volume energy, operational speed due to development of high specific force in a short period of time, increase of volume efficiency more than 10 times.

2 cl, 3 dwg