INTEGRATED HIGH-FREQUENCY MICROELECTROMECHANICAL SWITCH OF CAPACITIVE SWITCHING PRINCIPLE WITH HIGH CAPACITANCE FACTOR Russian patent published in 2024 - IPC H01H59/00 

FIELD: microsystem equipment.

SUBSTANCE: invention relates to microsystem equipment and can be used in integrated radio electronics for switching high-frequency radio signals over transmission lines. Integral high-frequency microelectromechanical switch of capacitive switching principle with high capacitance factor comprises a suspended movable electrode of an electrostatic drive, made in the form of a plate from a conducting metal material, divided into a left and a right area of electrostatic activation, which are connected to each other by a jumper made of conducting metal material, two pairs of suspended elastic zigzag-shaped suspension elements, made of conductive metal material, characterized by low stiffness coefficient, which enables to significantly reduce the value of the constant control voltage, two supporting-armature elements of the structure, made of a conductive metal material, lower fixed electrode of electrostatic drive, made of conducting material, divided into left and right electrostatic activation area, thin passivation layers made of dielectric material, two flat thin-film variable capacitance capacitors with metal-dielectric-metal plates, formed by the left and right electrostatic activation area of the lower fixed electrode of the electrostatic drive, by thin passivation layers located on their surface, as well as left and right electrostatic activation area of suspended movable electrode of electrostatic drive, through perforations in the plate of the suspended movable electrode of the electrostatic drive, the main control flat thin-film capacitor of constant high capacity with metal-dielectric-metal plates.

EFFECT: reduction of electromechanical and weight and size characteristics of the switch, possibility of performing detailed adjustment of the effective operating frequency range and the central resonance frequency at the design stage of the switch, characterized by low value of constant control voltage 3.5 V for electrostatic activation, which is compatible with integral radio electronics with a short time required to complete a cycle of the operation of closing and opening switch of 6.35 mcs and 3.1 mcs, respectively.

1 cl, 9 dwg