FIELD: measurement equipment.
SUBSTANCE: sensitive element of a microelectromechnical gyroscope is made of single-crystal silicon, representing a "frame in frame" structure. At the same time, in the outer frame there is an electrostatic power converter, compensating Coriolis moment in it, arising under secondary oscillations transmitted from the inner frame.
EFFECT: increased accuracy of measurements.
1 dwg
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RU2584267C1 |
