INTEGRAL ACCELEROMETER SENSITIVE ELEMENT Russian patent published in 2014 - IPC G01P15/08 G01P15/125 

FIELD: instrumentation.

SUBSTANCE: element is made of conducting silicon monocrystal. It incorporates pendulum 3 articulated by elastic suspensions 2 with carcass frame 1, plates 4 connected with carcass frame 1 via pads 6 arranged at said frame 1. Plates 4 have recesses 7 at joints with pads 6 at frame 1. Layers of dielectric 10 and metal 11 are made at surfaces of recesses 7 and pads 6 to up the quality of connection. Differential capacitor required for operation of integral accelerometer is composed by conducting surface of conducting silicon pendulum 3 and metal 11 applied on plates 4 on the side of pendulum 3 to make capacitive gap 5.

EFFECT: perfected metrological parameters.

4 cl, 2 dwg