METHOD OF DETERMINING SURFACE ROUGHNESS Russian patent published in 2013 - IPC G01B11/30 

FIELD: physics.

SUBSTANCE: method is realised using an interference technique. Several areas on the analysed surface are selected, the phase image of each of which can be obtained on a microscope photodetector. The phase image of each area is determined, for which at different phase values of the reference beam at least three energy values detected by each photodetector pixel over the exposure time are determined, wherein the phase of the reference beam is shifted by changing the position of the phase modulator. To determine each pixel-detected energy value, a curve of pixel brightness versus time is plotted while varying the position of the phase modulator and the obtained curve is integrated on the interval of the exposure time. The phase image of each area is interpreted and roughness of each area is determined with subsequent averaging of roughness over all areas and surface roughness is obtained. The phase modulator used can be a mirror which can move along the optical path of the reference beam.

EFFECT: high accuracy of determining surface roughness.

2 cl, 1 dwg