FIELD: physics.
SUBSTANCE: apparatus has a platform on which an object is placed and which is capable of moving on two main and one additional aerostatic bearings along a first horizontal axis, and a portal on which a phase-contrast microscope is mounted and which is capable of moving on two main and one additional aerostatic bearings along a second horizontal axis, perpendicular to the first horizontal axis. All aerostatic bearings are connected to a common pneumatic system, and the microscope is configured to obtain a fringe pattern through time intervals equal to the period of pressure fluctuation in the common pneumatic system.
EFFECT: providing high accuracy of the image of a microrelief of the surface of an object with mutual displacement of the microscope and the object.
2 dwg
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