METHOD OF DETERMINING PHASE PROGRESSION OF MONOCHROMATIC SURFACE ELECTROMAGNETIC WAVE IN INFRARED RANGE Russian patent published in 2013 - IPC G01J9/02 

FIELD: physics.

SUBSTANCE: invention relates to optical methods of inspecting a conducting surface in infrared radiation and can be used in physical and chemical analysis of growth the transition layer of the surface, in processes for controlling thickness and uniformity of thin-layer coatings of metal-coated articles and semiconductor substrates, as well as in sensors. The method of determining phase progression of a monochromatic surface electromagnetic wave in the infrared range involves generation of a surface electromagnetic wave in the entire spectral range of a wideband radiation source, recording fringe patterns formed as a result of interaction of radiation of a reference beam and a measuring beam arising from the surface electromagnetic wave, wherein the surface electromagnetic wave passes through different distances of a section of its path corresponding to outermost points of the controlled area. Radiation of the source has a harmonic component with wave number σ, which is equal to the wave number of the controlled surface electromagnetic wave, and calculation is carried out based on the relationship Δφ(σ), resulting from applying full Fourier transform to the fringe patterns.

EFFECT: shorter measurement time and providing uniqueness of determining phase progression Δφ of a monochromatic surface electromagnetic wave.

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