FIELD: machine building.
SUBSTANCE: method involves degreasing of a part, arrangement of a part in a vacuum chamber, pumping of the chamber till vacuum, pre-cleaning in inert gas medium, ionic cleaning/etching of surface, deposition of layers by condensation with ionic bombardment and cooling in vacuum, and then, in inert gas medium. The part is arranged at a flow focusing point of at least two vacuum arc plasma sources. Pre-cleaning is performed in environment of ionised inert gas. Ionic cleaning/etching of surface is performed by supplying to a substrate first of voltage in the range of 200-500 V; and then, it is smoothly or step-by-step increased to 1-1.5 kV. At that, for application of the coating microlayers there used are alloys on the basis of combinations of metals chosen from the group of Cr, Ni, W, Nb, Zr, Ti, Al, Mo by their simultaneous sputtering at the part rotation.
EFFECT: improvement of operability, reliability and durability of coated parts.
2 cl, 2 dwg
Title | Year | Author | Number |
---|---|---|---|
METHOD OF DEPOSITION OF PROTECTIVE COATINGS ON DETAILS MADE OUT OF REFRACTORY ALLOYS | 2000 |
|
RU2264480C2 |
METHOD OF PRODUCING PROTECTIVE COATING ON SURFACE OF POWER ENGINEERING PART | 2023 |
|
RU2824769C1 |
METHOD OF APPLYING WEAR-RESISTANT COATINGS AND IMPROVEMENT OF DURABILITY OF PARTS | 1999 |
|
RU2161661C1 |
METHOD FOR MAKING ENDOSSEOUS DENTAL IMPLANTS WITH BIOACTIVE COATING | 2015 |
|
RU2597750C1 |
DIAGNOSTIC TECHNIQUE OF OIL VAPORS PRESENCE IN VACUUM CHAMBER VOLUME | 2015 |
|
RU2605884C1 |
METHOD OF COMBINED PLASMA SURFACE TREATMENT OF ITEMS FROM TITANIUM ALLOYS | 2017 |
|
RU2671026C1 |
METHOD OF VACUUM ION-PLASMA COATING OF SUBSTRATE | 2000 |
|
RU2192501C2 |
FABRICATION OF REFRACTORY NANOCOMPOSITE COATING OF SURFACE OF REFRACTORY NICKEL ALLOYS | 2013 |
|
RU2549813C1 |
METHOD OF HARDENING TURBO MACHINE NOZZLE VANE UNIT MADE FROM NICKEL AND COBALT ALLOYS | 2010 |
|
RU2445199C2 |
METHOD OF NANOCOMPOSITE COATING APPLICATION ONTO STEEL ARTICLE SURFACE | 2013 |
|
RU2541261C2 |
Authors
Dates
2013-10-10—Published
2012-01-10—Filed