DIAGNOSTIC TECHNIQUE OF OIL VAPORS PRESENCE IN VACUUM CHAMBER VOLUME Russian patent published in 2016 - IPC C23C14/02 

FIELD: instrument making.

SUBSTANCE: invention relates to vacuum coatings on optical parts application technique. Diagnostic technique of oil vapors presence in vacuum chamber volume before application of vacuum coating on optical parts includes placement of cleaned control glass plate prior to optical components loading into vacuum chamber, air evacuation from vacuum chamber, extraction of control glass plate outside, wiping of its surface half with optical mixture for removal of settled oil film and providing of moisture condensation on control glass plate analyzed surface. Then performing visual comparison of surface both parts and in case of differences in control glass plate two halves surfaces appearance presence of oil film on glass plate surface unwiped half is diagnosed, which indicates inadmissibility of optical components for application of coating loading into vacuum chamber.

EFFECT: enabling higher quality of sputtered coatings on optical parts surfaces.

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