FIELD: engines and pumps.
SUBSTANCE: claimed combined pump system 10 comprises getter pump 12 and ion pump 13 to create superhigh vacuum. Said getter and ion pumps are arranged at one flange 11 on one side thereof and at two different points thereat. Implementation of said system allows easy withdrawal of permanent magnet from its seat without demagnetisation and several alternatives of magnet attachment to said flange.
EFFECT: higher reliability.
8 cl, 5 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| COMBINATION SCAVENGING PUMP SYSTEM INCLUDING GETTER PUMP AND ION PUMP | 2010 |
|
RU2520709C2 |
| ION-GETTER PUMP | 0 |
|
SU1102408A1 |
| COATING PRODUCED OUT OF THE GETTER-METAL ALLOY, AND ALSO THE INSTALLATION AND THE METHOD OF THE COATING PRODUCTION | 2003 |
|
RU2315819C2 |
| COMBINED MAGNETIC DISCHARGE GETTER-ION PUMP | 0 |
|
SU943920A1 |
| MAGNETIC DISCHARGE PUMP | 0 |
|
SU712869A1 |
| SINTERED NON-POROUS CATHODE ELECTRODES AND ION-SPRAYING VACUUM PUMPS CONTAINING SAME | 2017 |
|
RU2721379C2 |
| GETTER PUMP | 2015 |
|
RU2673834C2 |
| MAGNETIC ELECTRIC DISCHARGE PUMP | 1985 |
|
SU1321310A1 |
| MAGNETIC DISCHARGE PUMP | 0 |
|
SU642797A1 |
| COMBINED MAGNETIC DISCHARGE GETTER-ION PUMP | 0 |
|
SU1034100A1 |
