SINTERED NON-POROUS CATHODE ELECTRODES AND ION-SPRAYING VACUUM PUMPS CONTAINING SAME Russian patent published in 2020 - IPC H01J41/20 H01J41/12 F04B37/04 

FIELD: chemistry.

SUBSTANCE: invention relates to compositions of cathode electrodes suitable for use in vacuum devices. Nonporous cathode has average atomic weight W, enclosed in range from 80 to 160 amu, and contains in its chemical composition a sintered volumetric mixture of at least two different metal elements M1 and M2: i) M1 having atomic weight W1 in amount q1, expressed as atomic percentage of total number of Q atoms of cathode, and ii) M2, having atomic mass W2, in amount q2, expressed as atomic percentage of total number of atoms Q of cathode. M1 and M2 are both selected from titanium, tantalum, zirconium, niobium, hafnium, rare-earth elements, nickel or molybdenum. Average atomic mass of the cathode is defined as W=W1*q1+W2*q2. Sintered bulky mixture may contain one or more additional metal elements other than M1 and M2 in aggregate amount lower than 3 % of atoms relative to total number of Q atoms.

EFFECT: invention enables to obtain cathodes useful for use in SIP or other evacuating elements for high or ultrahigh vacuum applications.

5 cl, 3 tbl, 3 dwg