FIELD: engines and pumps.
SUBSTANCE: invention relates to pump engineering, particularly, to development of super high vacuum. Proposed system comprises getter pump (120; 220) and ion pump (130; 230). Both pumps (120, 220; 130, 230) are mounted at one flange (111; 211) arranged in opposition at the flange opposite sides so that conductivity of both pumps increases in direction of gas flow sources in vacuum chamber.
EFFECT: higher vacuum in the system.
11 cl, 5 dwg, 2 tbl
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|---|---|---|---|
| COMBINATION PUMP SYSTEM INCLUDING GETTER PUMP AND ION PUMP | 2009 |
|
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| IMPROVED HIGH-POWER GETTER PUMP | 1993 |
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| EVACUATED SOLAR PANEL WITH NON-EVAPORABLE-GETTER-BASED PUMP | 2008 |
|
RU2463529C2 |
| COATING PRODUCED OUT OF THE GETTER-METAL ALLOY, AND ALSO THE INSTALLATION AND THE METHOD OF THE COATING PRODUCTION | 2003 |
|
RU2315819C2 |
