COATING PRODUCED OUT OF THE GETTER-METAL ALLOY, AND ALSO THE INSTALLATION AND THE METHOD OF THE COATING PRODUCTION Russian patent published in 2008 - IPC C23C14/06 C23C14/34 

FIELD: electronic industry; other industries; methods and the devices for production of the getter-metallic alloy coatings.

SUBSTANCE: the invention is pertaining to the coating made out of the getter-metallic alloy and to the installation and the method for the coating production and may be used for deposition of the coating on the high-vacuum vessels representing the guiding ion beams tubes in the ion beams accelerator, for the purpose to obtain in them of the ultra-high vacuum. The coating on the internal wall of the high-vacuum vessel consists of the non-evaporating getter metal alloy without inclusions of the noble gases, produced by sputtering of the metal alloy out of the plasma of the getter metal alloy free of the noble gases. The installation generator of the plasma of the metal consists of the insulating component, which carries the igniting electrode and the cathode wire made out of the getter metal alloy. These three components are encircled by the cell-shaped anodic component, which together with the insulating component is protruding into the being coated high-vacuum vessel, and on them by means of the voltage feeding device the cathode potential, the high-voltage impulse of ignition and the anode potential are fed. The anode component together with the high-vacuum vessel is supported at the ground potential.

EFFECT: the invention ensures deposition of the coating produced out of the getter-metal alloy on the high-vacuum vessels.

33 cl, 9 dwg