FIELD: machine building.
SUBSTANCE: proposed method comprises creation of required vacuum by turbo molecular pump, ion purification by argon ions and ion-bombardment of part surface by nitrogen ions. Vacuum is created to 10-5 to 10-7 mm Hg. Ion purification is performed at energy of 8 to 10 keV, current density of 130 mA/cm2 to 160 mA/cm2 for 0.3 to 1.0 h. Said ion-bombardment of part surface is carried out in either continuous or pulse mode at 25 to 30 keV in dose of 1.6·1017 cm-2 to 2·1017 cm-2, at dose accumulation rate of 0.7·1015 s-1 to 1·1015 s-1.
EFFECT: better operating properties.
17 cl
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