FIELD: machine building.
SUBSTANCE: method involves sputtering of coating particles onto a surface. Some part of sputtered particles is directed immediately onto a part surface, and the other part is diverted from initial trajectory due to rebounding from inclined surface of a reflector. Movement of a part at sputtering is performed by formation of coating spots adjacent to each other without any gaps and laminations. Besides, a reflector allowing to obtain coating spots of the specified shape providing the above adjacency of spots to each other is used.
EFFECT: improving uniform thickness of the obtained coating.
3 dwg
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Authors
Dates
2014-01-20—Published
2012-03-11—Filed