METHOD AND APPARATUS FOR APPLYING TITANIUM NITRIDE-BASED COATINGS Russian patent published in 2015 - IPC C23C4/12 C23C24/08 

FIELD: chemistry.

SUBSTANCE: invention relates to application of coatings by a detonation method and can be used to produce powdered titanium nitride and apply coatings based thereon. A method of applying a titanium nitride-based coating on the surface of an article by detonation sputtering includes mounting a workpiece, feeding working gas into a barrel, feeding a detonation gas mixture into the barrel, initiating detonation of the mixture to perform sputtering and blowing the barrel with an inert gas. Titanium tetrachloride is first evaporated by heating. The gaseous titanium tetrachloride is mixed in a mixer with ammonia gas. The obtained reaction gas mixture is fed into the barrel together with the powder to be sputtered and the treated surface of the article is blown with nitrogen during sputtering. The apparatus for applying a titanium nitride-based coating on the surface of an article using said method consists of a gas detonation sputtering apparatus, a device for blowing the surface of the article with nitrogen, an ammonia gas source, a vapour generator for producing titanium tetrachloride, a mixer for obtaining a reaction mixture of ammonia and titanium tetrachloride and a valve for feeding said reaction mixture into the gas detonation sputtering apparatus.

EFFECT: enabling synthesis and obtaining a titanium nitride coating without forming a vacuum, as well as high efficiency and low power consumption when applying a titanium nitride coating.

2 cl, 1 dwg