IONIC SOURCE OF GLOW DISCHARGE WITH INCREASED ILLUMINATION Russian patent published in 2014 - IPC H01J27/02 H01J49/10 

FIELD: instrument making.

SUBSTANCE: glow discharge source includes a hollow anode having a shaped bottom part and a hollow cathode arranged in the anode cavity on the side of its open end, which are coaxial and cylindrical and arranged with a gap, and together form a discharge chamber. The chamber outlet is an axial hole for extraction of ions and pumping, which is formed in the bottom part of the hollow anode. The anode bottom part profile has the possibility of simultaneous self-focusing of an electron flow from the hollow cathode to an axial hole zone of the discharge chamber and formation of a parabolic electric field at the chamber outlet; with that, the anode bottom part facing inside the chamber has the shape of a convex cone and the part facing outside the chamber has a surface of a concave spherical shape.

EFFECT: increasing illumination of an ionic source of glow discharge owing to reducing diffusion losses of ions in a discharge chamber.

4 cl, 1 ex