ELECTROLYTE AND METHOD OF COPPER SEDIMENTATION ON THIN CONDUCTIVE SUBLAYER ON SURFACE OF SILICIC PLATES Russian patent published in 2014 - IPC C25D3/38 C25D7/12 

Abstract RU 2510631 C1

FIELD: chemistry.

SUBSTANCE: invention can be applied in technology of microelectronics, in which layer of copper is to be applied on thin sublayer of cobalt or its alloys (cobalt-phosphorus, cobalt-tungsten-phosphorus) or copper, which is located on the surface of silicic plates. Electro-sedimentation of copper is carried out from electrolyte of copperplating, which contains copper sulfate, ethyl alcohol, ethylenediaminetetraacetic acid (EDTA), ammonium laurylsulphate and ammonia in form of water solution.

EFFECT: electrolyte of copperplating does not contain ions of alkali metals and is suitable for application of copper layers on sublayer of copper, cobalt or its alloys.

4 cl, 4 ex

Similar patents RU2510631C1

Title Year Author Number
PROTECTIVE COATING FOR MEDICAL INSTRUMENTS AND METHOD OF ITS APPLICATION 2017
  • Telezhkina Alina Valerevna
  • Kuznetsov Vitalij Vladimirovich
  • Kruglikov Sergej Sergeevich
RU2674694C1
ELECTROLYTE COMPOSITION AND METHOD FOR OBTAINING NANOCRYSTALLINE COMPOSITE COATINGS BASED ON NICKEL-PHOSPHORUS-TUNGSTEN SYSTEM 2021
  • Krasikov Aleksej Vladimirovich
  • Merkulova Mariya Vitalevna
  • Markov Mikhail Aleksandrovich
  • Bykova Alina Dmitrievna
  • Belyakov Anton Nikolaevich
  • Ulin Igor Vsevolodovich
RU2792096C1
COPPER PLATING ELECTROLYTE 2002
  • L'Vovskij V.M.
  • Afonin E.G.
  • Barinov A.V.
RU2219293C1
METHOD OF ELECTROLITE-PLASMA PROCESSING OF METAL SURFACE 2013
  • Duradzhi Valentin Nikolaevich
  • Kaputkin Dmitrij Efimovich
  • Duradzhi Andrej Jur'Evich
RU2537346C1
PROCESS OF COPPER PLATING OF ALUMINUM 2002
  • Lukomskij Ju.Ja.
  • Rumjantsev E.M.
  • Zelenjuk Ju.I.
  • Manukjan A.S.
  • Nevskij O.I.
  • Kolod'Ko G.N.
  • Gribkov M.A.
RU2214483C1
METHOD FOR PRODUCING COMPOSITE METAL-DIAMOND COATING ON THE SURFACE OF MEDICAL DEVICE, DISPERSED SYSTEM FOR PRECIPITATION OF METAL-DIAMOND COATING AND METHOD FOR ITS PRODUCING 2020
  • Esaulov Sergej Konstantinovich
  • Esaulova Tselina Vatslavovna
  • Minyaeva Elena Vladimirovna
RU2746730C1
METHOD FOR PRODUCING COMPOSITE METAL-DISPERSED COATING, DISPERSED SYSTEM FOR PRECIPITATION OF COMPOSITE METAL-DISPERSED COATING AND METHOD FOR ITS PRODUCTION 2020
  • Esaulov Sergej Konstantinovich
  • Esaulova Tselina Vatslavovna
RU2746863C1
METHOD FOR PRODUCING A COMPOSITE METAL-DISPERSED COATING, DISPERSED SYSTEM FOR PRECIPITATION OF COMPOSITE METAL-DISPERSED COATING AND METHOD OF ITS PRODUCTION 2020
  • Esaulov Sergej Konstantinovich
  • Kukushkin Sergej Sergeevich
  • Svetlov Gennadij Valentinovich
  • Esaulova Tselina Vatslavovna
RU2746861C1
APPLICATION METHOD OF ELECTROLYTIC COPPER COATING TO PARTS FROM ALUMINIUM AND ITS ALLOYS 2011
  • Devjatkina Tat'Jana Igorevna
  • Rogozhin Vjacheslav Vjacheslavovich
  • Bol'Shakova Ol'Ga Aleksandrovna
  • Dumitrash Ol'Ga Vladimirovna
  • Mikhalenko Mikhail Grigor'Evich
RU2471020C1
ELECTROLYTE OF COPPER COATING 2006
  • L'Vovskij Vitalij Maksovich
  • Afonin Evgenij Gennadievich
RU2334831C2

RU 2 510 631 C1

Authors

Kruglikov Sergej Sergeevich

Valeev Adil' Salikhovich

Turaev Dmitrij Jur'Evich

Gvozdev Vladimir Aleksandrovich

Dates

2014-04-10Published

2012-12-25Filed