METHOD OF DETERMINING DENSITY OF DEFECTS ON SURFACE OF OPTICAL COMPONENT Russian patent published in 2014 - IPC G01N21/88 G01N17/00 G01N21/84 

FIELD: physics, optics.

SUBSTANCE: invention relates to power laser optics and a method of determining density of defects on the surface of an optical component. The method involves irradiating portions of the surface of the optical component with a beam of pulsed laser radiation with Gaussian intensity distribution, detecting breakdown of the surface furthest from the point of maximum intensity of the laser beam, determining the beam intensity value ε_i corresponding to said breakdown, determining the relationship between the probability density f(ε) of surface breakdown of the optical component and radiation intensity and selecting the least beam intensity value ε_imin. Density of surface defects of the optical component D is determined using the formula: $$D=\left(\frac{{\epsilon }_{i\min }}{\pi \cdot r_0^2}\right)\cdot \frac{f\left({\epsilon }_{i\min }\right)}{1-{\displaystyle \underset{0}{\overset{{\epsilon }_{i\min }}{\int }}f\left(\epsilon \right)d\epsilon }},$$ where r₀ is the beam radius on the level exp(-1) of the maximum radiation beam intensity.

EFFECT: high accuracy and easier measurement.

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