FIELD: electricity.
SUBSTANCE: method includes removal of residue gas particles ionised by the beam in question in the capacitor electric field, formation of the removed ionised particles in a ribbon beam by means of a slot, deviation of the ribbon beam particles by the capacitor electric field depending on their energy and formation of two-dimensional image of the ion beam in question by means of its delivery to the electro-optical converter consisting of an amplifier based on microchannel plates and luminophor-coated plate and further registration of the optical image by means of a camera-recorder. The optical axis of the camera-recorder is positioned against the display of the beam cross-section image sensor. A test geometrical figure is applied to the sensor display and compared to the reference geometrical figure included into a programmed algorithm of the calculating machine, thereafter adjustment of the camera-recorder is continued till shapes of the test and reference figures coincide.
EFFECT: improving accuracy in assessment of the ion beam distribution.
3 dwg
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Authors
Dates
2014-05-10—Published
2012-12-28—Filed