METHOD FOR FINISHING PLANARIZATION OF THE SURFACE OF AN OPTICAL GLASS CERAMICS Russian patent published in 2018 - IPC C03C23/00 

FIELD: optics.

SUBSTANCE: invention relates to a method for finishing planarization of the surface of an optical glass ceramics. Surface treatment of optical glass ceramics is carried out in two stages. In the first stage, the surface of optical glass ceramics is processed by beams of accelerated cluster argon ions. Further, in the second stage, the beams are processed by accelerated neutral argon atoms. At the same time, accelerating voltage in both stages of processing is in the range of 10–30 kV, processing time for each stage is set to not more than 15 minutes, at a residual gas pressure of not more than 4 × 10^-2 Pa.

EFFECT: technical result is simplification of the technological process of planarization of the surface while reducing the rms roughness of the surface of the optical glass ceramics by 30 % relative to its initial state.

1 cl, 2 dwg, 2 tbl