FIELD: process engineering.
SUBSTANCE: invention relates to machine building and may be used in aircraft and power engineering. Plies of chromium and aluminium are deposited and subjected to high temperature annealing in vacuum at 1050±5°C, residual pressure of 1.3(10-1-10-3) Pa for 2-5 hours. Chromium ply deposition from gas phase is executed at thermal decomposition of Cr(CO)6, while that of aluminium ply is performed at thermal decomposition of Al(CH3)3. Note here that at chromium decomposition Cr(CO)6 is heated to 110-120°C to set 400-450°C in deposition area while chromium ply is formed during at least 2-3 hours. At aluminium deposition Al(CH3)3 is heated to 100-110°C to set 300-350°C in deposition zone while aluminium ply is formed at least 5-6 hours. Proposed device comprises reaction chamber arranged inside vacuum chamber and separated by heat-insulating dense-vacuum web to preliminary zone and deposition zone that feature different temperature fields. Heated containers to accommodate coating material sources are arranged outside vacuum chamber and connected via heated transfer systems and heated valves with inlet into reaction chamber preliminary zone. Temperature field is created by heating system with the help of temperature field formation shields arranged in reaction chamber deposition zone.
EFFECT: higher quality of coating for operation at higher temperatures.
2 cl, 1 dwg, 1 tbl
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Authors
Dates
2014-06-20—Published
2012-02-28—Filed