FIELD: physics.
SUBSTANCE: invention relates to electronic engineering. Zinc oxide phosphor is deposited from an anhydrous inert medium on a substrate and placed inside a vacuum chamber in an indirect heating zone. Air is then pumped out from the chamber while simultaneously heating the substrate to temperature of 215°C, a hydrogen stream is fed at pressure of 0.10-0.15 Torr and electrodeless high-frequency discharge is simultaneously generated.
EFFECT: invention increases luminous efficacy of the phosphor 1.62 times.
2 dwg
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