MICROGYROSCOPE MANUFACTURING METHOD Russian patent published in 2020 - IPC H01L21/48 

FIELD: instrument engineering.

SUBSTANCE: invention relates to instrument making and can be used in making silicon sensitive elements of micromechanical angular velocity sensors and gyroscopes. Microgyroscope manufacture method includes manufacturing of parts and assembly units, assembly of resonator on the base, covering and sealing the cover with the base by laser welding, degassing and vacuuming of the microgyroscope in one operating cycle at residual pressure of not more than 5⋅10^-5 mm Hg at temperature not less than 150 °C for not less than 4 hours. At that, before the resonator is assembled on the base, titanium film is applied on inner surfaces of the base and cover. Degassing and degassing are carried out in the heating chamber through a pumping tube located on the cover, sealing is carried out in the air.

EFFECT: invention improves metrological characteristics of a microgyroscope by increasing the degree of vacuum in the inner cavity of the instrument.

3 cl, 1 dwg