FIELD: physics.
SUBSTANCE: invention relates to cleaning surfaces of gas-filled discharge devices when coating materials with ions fed into the discharge space. The method includes feeding into an ionisation chamber a carborane-based working substance and powerful oxidising agents which react with products which contaminate the ion extraction system and/or the inner surface of the ionisation chamber and/or a component thereof, to form volatile compounds. The working substance used is carborane dicarboxylic acid (C4H12B10O4), in which atoms of powerful oxidising agents are embedded in the molecule of the working substance. During electric discharge, the powerful oxidising agents, upon being released from molecules of the working substance, react with products which contaminate the ion extraction system and/or the inner surface of the ionisation chamber and/or a component thereof to form volatile compounds. The volatile compounds are removed by vacuum pumping.
EFFECT: high efficiency of the apparatus.
3 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| ION SOURCE | 1992 |
|
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