FIELD: analysis of elemental composition of surfaces of solid bodies, it can be used in particular for testing non-conducting materials of dielectrics.
SUBSTANCE: radiation of tested atoms is excited by plasma of gas spark discharge localized along tested surface due to restriction in discharge area above tested surface. The surface provides significant reduction of destroying influence, absence of charging and multiple excitation and irradiation of surface atoms of tested dielectric material.
EFFECT: lowered (improved) limit of detection during testing of elemental composition of surface coatings onto dielectrics; improved locality of analysis.
2 dwg
| Title | Year | Author | Number |
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|
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| GAS-DISCHARGE TUBE | 1996 |
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| 0 |
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SU1777055A1 | |
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