METHOD OF DETERMINING ENERGY SPECTRUM OF ELECTRONS IN ELECTRON BEAM Russian patent published in 2014 - IPC H01J47/00 G01R29/00 

FIELD: physics.

SUBSTANCE: method includes picking up continuous X-ray radiation from a portion of the surface of a solid body bombarded with electrons, measuring characteristics of the continuous X-ray radiation and determining energy distribution in the electron beam based on data on the continuous X-ray radiation; measuring, in any sequence, the energy spectrum of the continuous X-ray radiation of the investigated electron beam and the spectra of the continuous X-ray radiation of single-velocity beams generated in the same system in conditions of negligible electron energy spread in beams; measuring the energy spectra of continuous X-ray radiation for single-velocity electron beams at n discrete electron energy values in said beams; based on data on energy spectra of continuous X-ray radiation for single-velocity electron beams, calculating the kernel function of inverse integral transformation and determining energy distribution of electrons in the investigated beam by performing inverse integral transformation to obtain a kernel to a function which describes the spectrum of X-ray radiation of the investigated electron beam.

EFFECT: improved method.

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