FIELD: instrumentation.
SUBSTANCE: invention relates to gyroscopic vibration transducers. Transducer resonator (3) comprises the case of silicon-based material with at least one resonant part (Z) with at least one section coated with electrically conducting ply and at least one section not coated with conducting ply. Said section not coated with conducting ply is coated with protective layer (10) so that silicon-based material resonant part is completely coated with the combination of electrically conducting and protective layers.
EFFECT: enhanced operating performances.
9 cl, 2 dwg
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Authors
Dates
2014-08-27—Published
2010-11-10—Filed