FERROELECTRIC CAPACITOR MANUFACTURING METHOD Russian patent published in 2014 - IPC H01G7/06 

FIELD: electricity.

SUBSTANCE: in order to manufacture a ferroelectric capacitor to the substrate (1) the lower electrode (2) is sprayed, and the film-forming solution based on lead titanate circonate is applied to its layer-by-layer with subsequent drying and pyrolysis to form several layers of solid solution (3-1)…(3-n). The formed several layers of solid solution (3-1)…(3-n) are subject to crystallization (4) in order to receive ferroelectric film (5). The upper electrode (6) is sprayed to the ferroelectric film (5). In order to receive solid solution layer (3-1) joining the lower electrode to the film-forming solution based on lead titanate circonate 0-7% lead excess is introduced beyond stochiometry and in order to form remaining solid solution layers (3-2)…3-n to the film-forming solution based on lead titanate circonate 8-30% lead excess is introduced beyond stochiometry.

EFFECT: improving electrical properties of ferroelectric film based on lead titanate circonate: improvement of residual polarization, dielectric non-linearity and reduction of leak current.

9 cl, 6 dwg, 2 ex