METHOD OF PRODUCTION OF PIEZOELECTRIC FILM Russian patent published in 2000 - IPC

FIELD: production of piezoelectic materials; applicable in radioelectronics, piezoengineering; acoustoelectronics. SUBSTANCE: method preparation of initial solution from nitrate salts of metals-components of film; mixing of obtained solutions with solution of citric acid in ethylene glycol; heating of mixture at 80-90 C to obtain viscous solution of polymer; dilution with monobasic alcohol C₁-C₅ or glycol monoalcoxy derivative; application of obtained material to base; drying at temperature of 80-100 C up to removal of solvent; sharp raising of temperature to 350-420 C and holding at this temperature to partial melting of film and tecomposition of metalloorganic compounds; again sharp raising of temperature to 550-600 C and holding at this temperature to form perovskite structure. Method allows preparation of homogeneous precursors possessing incomparably higher stability, preserving homogeneity for prolonged period of time (above 1 year) and not needing immediate use. Produced from precursors prepared according to the claimed methods are coatings with uniform distribution of metals inside applied layer. In addition, using the claimed method, it is possible to produced textured coating, provide for higher adhesion of coating to bases of various types such as metal, ceramic, and single crystals with preserved continuity and stoichiometry of coating due to development method of precursor synthesis and conditions of heat treatment. Offered conditions of heat treatment ensures uniformity of applied layer in composition and makes it possible to obtain perovskite structures without formation of intermediate phases, and conduction of process in normal atmosphere without use of inert gases or vacuum, that simplifies process apparatuses and reduces cost of process of application of coatings due to use of easily available and low-cost raw materials. EFFECT: higher efficiency. 2 cl, 3 dwg, 1 ex