METHOD OF FORMING ZINC OXIDE-BASED LAYERS Russian patent published in 2014 - IPC C23C14/08 C23C14/35 

FIELD: chemistry.

SUBSTANCE: intermediate and basic zinc oxide-based layers, alloyed with gallium or aluminium, are formed on a substrate. The intermediate layer is formed with a concentration of an alloying component in the interval from a value, which coincides with the concentration in the basic layer, to 20 at. %. In particular cases of the invention realisation the intermediate layer is subjected to exposure at 200°C to 500°C for the time from 5 minutes to 2 hours before the application of the basic layer. The intermediate layer is made continuous or insular. Formation of layers is carried out in passing magnetron installations and as a target applied is a sectioned target, in which a part of the target, which is located from the side of a substrate included into the installation, contains higher content of an alloying component than that in the remaining part of the target.

EFFECT: total time of application of a sublayer and the basic layer is reduced, control of a synthesised layer relief is provided and the application of materials, different from materials, included into the basic layer is excluded.

5 cl, 1 ex