FIELD: chemistry.
SUBSTANCE: target for ion-plasma sputtering is made on the basis of metal oxide and contains carbon. Concentration of carbon in target is selected on condition of provision at sputtering temperature of thermal effect from exothermic reaction in oxidation of carbon by metal oxide oxygen and free oxygen in sputtering zone, lower integral heat removal in said zone, and constitutes 0.1-20 at %. Metal oxide is represented by zinc oxide.
EFFECT: invention will make it possible to improve characteristics of applied layers, increase degree of target application and reduce energy consumption in the process of sputtering.
2 cl, 2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| MATERIAL FOR GAS-THERMAL APPLICATION, METHOD OF ITS MANUFACTURE AND METHOD OF ITS APPLICATION | 2016 |
|
RU2646299C2 |
| OXIDE FILM DEPOSITION METHOD | 2004 |
|
RU2307713C2 |
| METHOD OF MAKING ZINC OXIDE-BASED TARGET | 2011 |
|
RU2491252C2 |
| METHOD OF FORMING ZINC OXIDE-BASED LAYERS | 2013 |
|
RU2531021C2 |
| METHOD FOR TRANSPARENT CONDUCTIVE COATING PRODUCTION | 2009 |
|
RU2451768C2 |
| SYNTHESIS METHOD OF CERAMIC ON BASIS OF ZINC OXIDE | 2008 |
|
RU2382014C2 |
| PROTECTIVE ORNAMENTAL COATING APPLICATION METHOD | 1992 |
|
RU2039844C1 |
| METHOD FOR APPLYING METAL COATINGS MADE OF COPPER AND COPPER ALLOYS TO GLASS PRODUCTS | 2021 |
|
RU2777094C1 |
| METHOD OF SYNTHESIS OF CERAMICS | 2004 |
|
RU2280015C2 |
| COATED ARTICLE HAVING BORON-DOPED ZINC OXIDE BASED LAYER WITH ENHANCED DURABILITY UNDER FUNCTIONAL LAYER AND METHOD OF MAKING THE SAME | 2011 |
|
RU2598007C2 |
