FIELD: metallurgy.
SUBSTANCE: invention relates to production of thin films, particularly, to vacuum application of transparent conductive coatings by magnetron sputtering. Method for production of transparent conductive coatings of zinc oxide alloyed with helium on glass or polymeric substrate includes magnetron sputtering of cathode material consisting of zinc oxide alloyed with helium, sputtered material deposition on heated substrate with film forming on cathode material. Cathode sputtering is conducted in direct current argot atmosphere with unbalanced magnetic field of magnetron, which provides ion current density of 1 mA/cm2 and more on the substrate, with deposition performed on the substrate heated to the temperature of no more than 110°C. Unbalanced magnetic field of magnetron sputtering system is used.
EFFECT: electrophysical properties and homogeneity of distribution of coating electrophysical properties on a substrate at the temperature no more than 110°C.
9 dwg
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