METHOD FOR OBTAINING NANODIMENSIONAL FILMS OF Bi-CONTAINING FERRITES-GARNETS Russian patent published in 2014 - IPC C30B23/02 C30B23/06 C30B29/28 C23C14/28 B82B3/00 B82Y30/00 B82Y40/00 

Abstract RU 2532185 C1

FIELD: nanotechnologies.

SUBSTANCE: invention relates to a technology for obtaining films of ferrites-garnets and can be used in application magneto-optics to obtain magneto-optic disks, modulators and deflectors. The method involves manufacture of a target of the specified composition, treatment of a monocrystalline substrate of gallium garnet with argon ions, spraying of the target onto the substrate with further annealing of the obtained film; with that, a substrate of complex replaced gallium garnet is used; the spraying process is performed onto the substrate heated up to 800-850°C; controlled oxygen ion flow is supplied to the substrate areas during the spraying process, and the obtained films are annealed in oxygen environment during 0.5-1.0 hour at the temperature of 700-750°C and normal atmospheric pressure.

EFFECT: invention allows improving quality of obtained nanodimensional films of Bi-containing ferrites-garnets, as well as a value of specific faraday rotation.

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RU 2 532 185 C1

Authors

Kostishin Vladimir Grigor'Evich

Chitanov Denis Nikolaevich

Komlev Aleksandr Sergeevich

Judanov Nikolaj Anatol'Evich

Trukhan Vladimir Mikhajlovich

Shelkovaja Tat'Jana Vladimirovna

Dates

2014-10-27Published

2013-09-26Filed