FIELD: measurement equipment.
SUBSTANCE: invention represents a vibration detector in microelectromechanical design and may be used to record vibration, also with submicron amplitude, and to measure vibration parameters. The detector comprises an elastic element with magnetoresistive sensors at both sides, made as capable of oscillations in a substantially heterogeneous field of the magnet with flat holes. Oscillation of the elastic element caused by vibration results in a change of magnetoresistor resistances in antiphase, and outer fields cause cophased change of magnetoresistors resistances, which increases sensitivity of the vibration detector and expands possibilities for extraction of a useful signal.
EFFECT: increased sensitivity under low amplitudes of vibration and reduced impact of external electromagnetic fields.
5 cl, 2 dwg
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GEOPHONE | 0 |
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Authors
Dates
2014-12-20—Published
2013-05-13—Filed