MICROELECTROMECHANICAL SENSOR OF MICRO MOTIONS WITH MAGNETIC FIELD Russian patent published in 2014 - IPC G01H11/02 H01L27/20 

FIELD: measurement equipment.

SUBSTANCE: invention relates to the field of instrument making. It may be used in sensors of motions in systems of navigation, automatic control and stabilisation of mobile objects. The technical result is achieved due to the fact that a microelectromechanical sensor of micro motions with a magnetic field comprises a console 1, formed in a silicon crystal 2 with formation of a gap 3, a magnetic sensitive element 4 and a permanent magnet 5. At the same time the surface of the crystal 1 is coated with an insulating layer 6. On the surface of the insulating layer 6, at least on the part of the console 1 and at least on the part of the surface of the crystal 1, including the edge of the gap 3, opposite to the end of the console 1, on the insulating layer there is a magnetic conductor 7 from a film of soft magnetic material. The permanent magnet 5 is placed on the magnetic conductor 7. The magnetic sensitive element 4 is placed in the field of change of the magnetic field generated by the permanent magnet 5, during movement of the console 1.

EFFECT: reduced weight and dimension characteristics, and increased resolution.

3 cl, 6 dwg