FIELD: physics.
SUBSTANCE: method comprises irradiating a moving film with a beam of accelerated ions through a diaphragm with an opening and subsequent etching. The beam is scanned along a line which passes through one or more diaphragms. The speed of the beam in the plane of the diaphragm (ν), the diameter of the opening in the diaphragm (d), the diameter of the cross-section of the beam in the plane of the diaphragm (D) and the intensity of the beam (I) are selected from the relationship 0.1≤2Id2/Dν≤10. The ratio of the speed of the film to the beam scanning frequency is greater than the minimum allowable size of the membrane.
EFFECT: high efficiency of the method while simplifying the technology.
3 cl, 4 dwg, 3 ex
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Authors
Dates
2015-02-20—Published
2013-09-24—Filed