FIELD: electricity.
SUBSTANCE: method to manufacture multi-tip emission cathode includes radiation of dielectric polymer film by accelerated heavy ions with energy sufficient to create through latent tracks through film. Film is radiated at the side radiated with accelerated heavy ions, ultraviolet radiation and its chemical etching to form dead holes of conical shape. Dead holes are metallised, and simultaneously film surface adjacent to them is metallised with subsequent thickening of deposited layer by galvanic method. Then at the opposite side of polymer film, etching of film is carried out to open dead holes.
EFFECT: creation of ensemble of microneedles with diametre of tips of 20÷40 nm and realisation of electrode-to-electrode distances in micron range with accuracy of ~ 0,2 mcm.
2 dwg
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