METHOD FOR DETERMINING DYNAMIC ERRORS OF MICROMECHANICAL INERTIAL SENSORS AND INERTIAL MEASUREMENT MODULES ON THEIR BASIS Russian patent published in 2015 - IPC G01D3/00 

FIELD: measurement equipment.

SUBSTANCE: invention relates to metrology. A method for determining dynamic errors of micromechanical inertial sensors consists in the fact that determination of a dynamic error is performed by comparison of characteristics set by a stand of oscillations to characteristics reproduced with a micromechanical sensor or a module. With that, oscillations are reproduced with the stand and recorded with the micromechanical sensor or an inertial measurement module in a frequency spectrum covering the whole frequency range of the object operation and corresponding to certain operating conditions with further treatment by the following formula: S_out(ω)=|W(jω)|²·S_in(ω), where S_out(ω) - spectral power density of a signal of the micromechanical sensor or module, S_in(ω) - spectral power density of an input signal from the stand, |W(jω)| - an amplitude-frequency characteristic of the sensor or the module being tested. A calculation of spectral densities of power of input and output signals is performed by transition from a time domain to a frequency domain by Fourier transformation; with that, an experimentally determined amplitude-frequency characteristic |W(jω)| of the sensor or the module characterises dispersion D of error of the object being tested in the specified frequency spectrum, and root-mean-square deviation of dynamic error of the micromechanical sensor is in compliance with the following expression: $$\sigma =\sqrt{D}.$$

EFFECT: higher accuracy.