STRAIN GAGE PRESSURE SENSOR BASED ON THIN-FILM NANO- AND MICROELECTROMECHANICAL SYSTEM Russian patent published in 2015 - IPC G01L9/04 B82B1/00 

FIELD: electricity.

SUBSTANCE: sensor comprises a case with a pipe union, a membrane, a spring beam shaped as a rectangular prism, at which outer surface strain gage pressure sensors are placed. At the beam side edges, under the zones of the strain gage pressure sensors placement, there are feed-through caves forming thickening areas outside the zones of the strain gage pressure sensors placement and a link interconnecting the beam ends. In the link central part there is an opening with dimensions exceeding the lateral dimensions of the rod. The feed-through caves are made as elements of toroidal surfaces placed over the beam lateral axis symmetrically while the link is made as a cylindrical ring and the elements of the toroidal surfaces separated from the beam working part by cuts made in the parallel longitudinal axis of the beam. The strain gage pressure sensors are placed symmetrically in regard to the beam longitudinal side at the minimum possible distance from each other. The radius of the toroidal surfaces and the distance between the outer surface of the beam and centres of radii of the toroidal surfaces are related by the respective ratios.

EFFECT: improved time and temperature stability, resource, service life and sensitivity, reduced error in result of non-linearity of the sensor static characteristic.

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