FIELD: measurement equipment.
SUBSTANCE: invention relates to instrument making, may be used independently or within measurement and computing complexes and control systems. The method to measure difference of pressures by a sensor with a frequency-modulated output signal consists in the fact that they use two identical membranes with resonators grown on them epitaxially, separated by a vacuumised gap. A sensor for measurement of pressure difference with a frequency modulated output signal comprises a hollow body, two identical membranes with epitaxially grown resonators, a system of resonator oscillations excitation with a permanent magnet and a system of generation of an output signal separated by a vacuumised gap.
EFFECT: simplified design of a sensor and its improved manufacturability.
2 cl, 3 dwg
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