MICROELECTRONIC WELL SENSOR OF ABSOLUTE PRESSURE Russian patent published in 2020 - IPC G01L9/08 E21B47/06 

FIELD: measuring equipment.

SUBSTANCE: invention relates to measurement equipment, namely, to high-accuracy microelectronic well transducers and sensors operating in aggressive media at high temperatures higher than 125 °C and pressure of 10 to 150 MPa. Disclosed is a pressure sensor, an elongated cylindrical housing of which consists of a bellows pressure receptacle module, made in the form of an elastic bellows, the input of which is hermetically sealed by a rigid disc-shaped cover, and its output through adapter made in form of cylinder with axial through channel is connected to input of basic module, made in form of thick-wall cylinder, inside of which there is a sealed working cavity consisting of cavity of the bellows pressure receptacle module, which is equipped with through electrical hermetic outlets, a partition forming inside the sensor housing on the side of the bellows pressure receiver, the cavity of the through channel of the adapter and the cavity of the basic module, in which the microelectronic sensitive element (SE) is mounted, electric terminals of which are connected to electric hermetic outlets of the partition, which are brought into the cavity of the microelectronics module. Partition with electric hermetic outlets is hermetically mounted at the input of the basic module, or in the version in the adapter channel, and SE, connected to hermetic outlets, is located in filled with force-transmitting liquid of working cavity consisting only of cavity of bellows pressure receptacle module and in version from cavity of bellows pressure receptacle module and cavity of adapter channel.

EFFECT: reduced volume of part of working cavity filled with force-transmitting non-aggressive liquid.

10 cl, 7 dwg