FIELD: chemistry.
SUBSTANCE: invention can be used in producing photosensitive cells for solar power generation and night vision devices. A dry silicon surface is irradiated with multiple focused ultra-short femto- or short picosecond laser pulses for ablation microstructuring thereof. In order to dope the surface layer of silicon with sulphur atoms, the microstructured surface is treated with multiple ultra-short pulses under a thin layer of a carbon sulphide liquid phase, for which a silicon target is immersed therein. Sulphur atoms formed from decomposition of carbon sulphide diffuse into the volume of the condensed silicon phase.
EFFECT: invention enables to form a microstructured layer on a silicon surface which is heavily doped with sulphur atoms - up to 5 at %.
2 cl, 4 dwg
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