UNIT OF CATHODE OF MAGNETRON DIFFUSER Russian patent published in 2015 - IPC C23C14/35 

FIELD: electricity.

SUBSTANCE: in a unit of the cathode of a magnetron diffuser magnets are mounted at the base of a ferromagnetic material and separated from the target by a gap, at that the base from the target side is made with a ledge length-aligned and symmetrical to its longitudinal axis, thus forming a closed loop separated from the target by a heat-conducting gasket, at the opposite side of the base, under the loop, there is a channel for cooling fluid graded in its cross-section, which is covered hermetically by a plug and which comprises openings for the cooling fluid feeding and draining.

EFFECT: enhanced reliability of the unit operation and service life thereof.

2 cl, 2 dwg