MAGNETRON ATOMIZER CATHODE UNIT Russian patent published in 2008 - IPC C23C14/35 

FIELD: machine engineering, namely, manufacture of parts with coating with use of magnetron atomizer.

SUBSTANCE: target has outer and inner sides and it is made at least partially of atomized material. Magnets heat insulated relative to target are arranged at inner side of it. At least one pipeline through which cooling fluid is fed and which has portion of wall that does not transmit heat directly from target. Each magnet is mounted with possibility of changing distance from said portion of pipeline wall; between each magnet and respective portion of pipeline wall intermediate heat transfer member is arranged. Said member is made of non-ferromagnetic magnetic material with high heat conductance.

EFFECT: improved efficiency of cooling cathode unit and magnets.

4 cl, 4 dwg